The main classifications of semiconductor parts processing in Dongguan

Semiconductor parts processing in Dongguan: Semiconductor components are the key components of semiconductor equipment. According to incomplete statistics, there is no standard for the classification of semiconductor components in the industry at present. Currently, there are mainly the following classification methods.

According to the internal flow of typical integrated circuit equipment cavities, components can be classified into five major categories: power supply and RF control type, gas delivery type, vacuum control type, temperature control type, and transmission device type. Among them, the power supply and RF control category includes RF generators and matchers, DC/AC power supplies, etc. Gas transportation mainly includes flow controllers, pneumatic components, gas filters, etc. Vacuum control category includes various vacuum pumps such as dry pumps/cold pumps/molecular pumps, various valve components such as control valves/pendulum valves, pressure gauges and O-Ring sealing rings. The temperature control category includes heating plates/electrostatic suction cups, heat exchangers and lifting components. The transmission device category includes mechanical arms, EFEM, bearings, precision tracks, stepper motors, etc.

According to the main materials and application functions of semiconductor components, they can be classified into twelve major categories, including silicon/silicon carbide parts, quartz parts, ceramic parts, metal parts, graphite parts, plastic parts, vacuum parts, sealing parts, filtration parts, moving parts, electrical control parts and other parts. Among them, each major category of components also includes several sub-products. For instance, in vacuum components, there are various key parts such as vacuum gauges (for measuring process vacuum), vacuum pressure gauges, gas flow meters (MFC), vacuum valve components, and vacuum pumps.

According to the service objects of semiconductor components, core semiconductor components can be divided into two types, namely precision machined parts and general purchased parts. Precision machined parts are usually designed by engineers from various semiconductor equipment companies themselves and then outsourced for processing. They are only used in the equipment of their own companies, such as process chambers and transmission chambers. Domestic production is relatively easy, but generally, the requirements for surface treatment, precision machining and other process technologies are relatively high. General purchased parts are some general components that have been verified over a long period of time and widely recognized by numerous equipment manufacturers and manufacturing plants. They are more standardized and will be used by different equipment companies as well as spare parts and consumables on production lines. For example, silicon structural components, O-Ring sealing rings, valves, gauges, pumps, Face plates, gas Shower heads, etc. Due to the strong universality and consistency of these components and the need to obtain certifications on equipment and manufacturing production lines, the difficulty of domestic production is relatively high.