Precision hardware parts processing refers to the processing of some hardware components with small diameters.

It mainly includes precision turning, mirror grinding and grinding. Micro-turning is carried out on a precision lathe using finely ground single crystal diamond turning tools. The cutting thickness is only about 1 micron. It is usually used for processing high-precision and smooth surface parts, such as spherical mirrors, aspheric mirrors and plane mirrors made of non-ferrous metal materials.

When the processing accuracy of precision parts is in nanometers or even atomic units (with atomic lattice distances ranging from 0.1 to 0.2 nanometers), the processing methods for ultra-precision parts cannot adapt. Special precision parts processing methods, namely chemical energy, electrochemical energy, thermal energy or electrical energy, must be adopted to make these energies exceed the binding energy between atoms, so as to eliminate the adhesion, combination or lattice deformation of certain atoms on the workpiece surface, thereby achieving the purpose of ultra-precision processing. This process includes mechanochemical polishing, ion sputtering and ion implantation, electron beam exposure, laser beam processing, metal evaporation and molecular beam epitaxy.